Electric fields in the sheath formed in a 300 mm, dual frequency capacitive argon discharge
نویسندگان
چکیده
منابع مشابه
Anomalous capacitive sheath with deep radio-frequency electric-field penetration.
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چکیده ندارد.
15 صفحه اولCollisionless heating in capacitive discharges enhanced by dual-frequency excitation.
We discuss collisionless electron heating in capacitive discharges excited by a combination of two disparate frequencies. By developing an analytical model, we find, contrary to expectation, that the net heating in this case is much larger than the sum of the effects occurring when the two frequencies act separately. This prediction is substantiated by kinetic simulations, which are also in exc...
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ژورنال
عنوان ژورنال: Plasma Sources Science and Technology
سال: 2007
ISSN: 0963-0252,1361-6595
DOI: 10.1088/0963-0252/16/2/016